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Flat Top/Homogenizers can handle a wide range of field geometries and beam shapes - top hat, rectangular, square and lines
Homogeneity up to the technical limits (up to 1% non-uniformity)
High NA, high fill factor and retention of polarization
Optical efficiency up to 90 % help to cut the cost of expensive laser energy
Manufactured from high-quality material fused silica, suitable for many different laser sources (e.g., excimer laser, solid-state laser, diode laser)
Customized freeform surfaces, such as circular, hexagonal, square with highest precision on different wafer sizes (up to 8 inches)
Key Specifications
Part No.
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Product Code
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Material
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Pitch
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Dimensions
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Radius of Curvature
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Lens Layout
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Lens Type
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| Beam Homogenizer | 18-00135 * | Fused Silica | 300 μm | 10 x 10 mm | 3.6 mm ± 5% | Single-Sided | cylindrical |
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| Beam Homogenizer | 18-00112 * | Fused Silica | 500 μm | 10 x 10 mm | 1.5 mm ± 5% | Single-Sided | cylindrical |
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| Beam Homogenizer | 18-00094 * | Fused Silica | 500 μm | 10 x 10 mm | 2.04 mm ± 5% | Single-Sided | cylindrical |
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| Beam Homogenizer | 18-00265 * | Fused Silica | 300 μm | 10 x 10 mm | 0.38 mm±5% | Double-Sided Lenses Parallel | cylindrical |
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| Beam Homogenizer | 18-00279 * | Fused Silica | 300 μm | 5 x 5 mm | 0.29 mm±5% | Double-Sided Lenses Parallel | cylindrical |
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| Beam Homogenizer | 18-00834 * | Fused Silica | 350 μm | 10 x 10 mm | 0.73 mm±5% | Double-Sided Lenses Parallel | cylindrical |
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| Beam Homogenizer | 18-00128 * | Fused Silica | 250 μm | 10 x 10 mm | 0.711 mm±5% | Single-Sided | cylindrical |
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| Beam Homogenizer | 18-00244 * | Fused Silica | 250 μm | 10 x 10 mm | 0.75 mm±5% | Double-Sided Lenses Parallel | cylindrical |
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| Beam Homogenizer | 18-00109 * | Fused Silica | 500 μm | 10 x 10 mm | 5 mm±5% | Single-Sided | cylindrical |
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| Beam Homogenizer | 18-00278 * | Fused Silica | 300 μm | 10 x 10 mm | 0.29 mm±5% | Double-Sided Lenses Parallel | cylindrical |
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| Beam Homogenizer | 18-00988 * | Fused Silica | 250 μm | 10 x 10 mm | 0.29 mm±5% | Double-Sided Hexagonal Grid | circular |
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| Beam Homogenizer | 18-00121 * | Fused Silica | 500 μm | 10 x 10 mm | 3 mm±5% | Single-Sided | cylindrical |
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| Beam Homogenizer | 18-00131 * | Fused Silica | 300 μm | 10 x 10 mm | 0.38 mm±5% | Single-Sided | cylindrical |
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| Beam Homogenizer | 18-00251 | Fused Silica | 250 μm | 5 x 5 mm | 0.75 mm±5% | Double-Sided Lenses Parallel | cylindrical |
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| Beam Homogenizer | 18-00087 * | Fused Silica | 250 μm | 5 x 5 mm | 0.35 mm±5% | Hexagonal Grid Single-Sided | circular |
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| Beam Homogenizer | 18-00271 * | Fused Silica | 400 μm | 10 x 10 mm | 0.7 mm±5% | Double-Sided Lenses Parallel | cylindrical |
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| Beam Homogenizer | 18-00987 * | Fused Silica | 250 μm | 10 x 10 mm | 0.35 mm±5% | Hexagonal Grid Single-Sided | circular |
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